Chemical Dispense & Distribution


	Bulk Pumping Module (BPM III) is engineered to supply bulk chemicals from large source containers to remote points of use. Source containers range from 55 gallon drums to 250 gallon totes with source switchingcapability, and pumping rates up to 15 GPM. Sources can be housed in IDI-CYBOR Safety Storage Modules or in storage rooms. BPMs are available in coated steel, stainless steel, and poly construction.
	Chemical Delivery System (CDS) provides point of use storage and delivery. The CDS is engineered to meet Semiconductor Specification. The CDS is then easily configured to meet internal EH&S and local codes. PLC controls for easy operation and configurable to meet a variety of uses. Local storage for photo chemicals as well as pressurized canisters from 1 to 5 gallon (20 Liters) can be accommodated. Canister configurations for manual or bulk fill are available. The CDS provides a modular stainless steel design. Starting from the base module (31” W x 23” D X 75”H), the system can be expanded to meet the customers specific needs.
	The Waste Evacuation System provides a safe, automated means of process waste removal from individual to complete fabs. The simple yet reliable design eliminates spills and expensive clean-ups.