Oxford Instruments Plasma Group

Our etch, deposition and growth systems provide process solutions for the micro- and nanometre engineering of materials for semiconductor, optoelectronics, HBLED, Photovoltaics, MEMS & microfluidics, high quality optical coating and many other applications in micro- and nanotechnology.

Products range from compact stand-alone systems for R&D, through batch tools and up to clustered cassette-to-cassette platforms for high-throughput production processing.

For more information please visit www.oxinst.com