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3.
Chemical Mechanical Planarization
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METRYX
Tools for characterizing a wafer’s mass with atomic precision
done non-destructively and non-intrusively and can highlight
process problems quicker than any other form of metrology. |
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SPM:
CMP polisher carrier rings and force transfer buttons (PPS,
Delrin, Ceramic and other materials) |
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ProSys
manufacturers sub-micron contamination-sensitive products,
ProSys' MegaSonics Cleaners provides superior cleaning performance,
substantially higher reliability. |
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Axus
Technology: provides advanced state-of-the-art equipment
and process solutions for surface processing applications,
including polishing, grinding and lapping.
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Tamar
Technology: Precision metrology systems such as Optical
Profilometer, Wafer Thickness, Vision Metrology, & Defect
Detection |
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