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9.
Thin Films, Deposition & Ion Implant
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METRYX
Tools for characterizing a wafer’s mass with atomic precision
done non-destructively and non-intrusively and can highlight
process problems quicker than any other form of metrology. |
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Tamar
Technology: Precision metrology systems such as Optical
Profilometer, Wafer Thickness, Vision Metrology, & Defect
Detection |
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FA-2000™ Emission Microscope System Identify Leaky
Junctions Contact spiking Hot electron effects CMOS latch-up
Oxide leakage Polysilicon filaments Silicon mechanical and
ESD damage . |
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